Picosun's PicoArmourTM reduces semiconductor manufacturing costs

"Picosun's approach with PicoArmourTM is to combine the highly-etch-resistant Y2O3 ALD process with more robust ALD processes. A high performance ALD corrosion barrier combining the speed and convenience of Al2O3 process with the durability of Y2O3 can be achieved by carefully controlling the film composition. With ALD, the protective effect can be achieved with thinner films, which in turn leads to material savings and a more environmentally friendly process", states Juhana Kostamo, VP, Industrial Business Area of Picosun Group.

"Picosun's approach with PicoArmour^TM is to combine the highly-etch-resistant Y₂O₃ ALD process with more robust ALD processes. A high performance ALD corrosion barrier combining the speed and convenience of Al₂O₃ process with the durability of Y₂O₃ can be achieved by carefully controlling the film composition. With ALD, the protective effect can be achieved with thinner films, which in turn leads to material savings and a more environmentally friendly process", states Juhana Kostamo, VP, Industrial Business Area of Picosun Group.

To learn more about PicoArmour^TM and a study Picosun has done related to protective coatings against plasma damage, join Picosun talk at the virtual ALD 2021 conference on June 29 at 10:25 am EDT. Register here.

*Values dependent on deposition and etch parameters

Picosun provides the most advanced AGILE ALD^® (Atomic Layer Deposition) thin film coating solutions for global industries. Picosun's ALD solutions enable technological leap into the future, with turn-key production processes and unmatched, pioneering expertise in the field – dating back to the invention of the technology itself. Today, PICOSUN^® ALD equipment are in daily manufacturing use in numerous leading industries around the world. Picosun is based in Finland, with subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

More information:

Juhana Kostamo
Vice President, Industrial Business Area, Picosun Group
Tel: +358 50 369 9565
Email: [email protected] 
www.picosun.com

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https://news.cision.com/picosun-oy/r/picosun-s-picoarmour-tm--reduces-semiconductor-manufacturing-costs,c3358445

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