Semiconductor Factory Automation: Technology Issues and Market Forecasts.

This report addresses these technical issues, presenting an analysis of the semiconductor factory automation industry, the key players, and the driving forces directing semiconductor factory automation.

Markets are segmented as: 1. Automated transfer tools (robots, elevators, platforms, etc.), 2. Carrier transport (monorail, AGV, AS/RS, etc.), 3. Manufacturing execution systems (MES) software.

With the move to 450mm wafers changes in wafer size, weight, fragility, risk of damage or creation of damaging particles existing wafer handling robots and the drives, motors, linear components and controls that automate these wafer handling tools will need a new generation of components to satisfy the requirements of 450mm wafer handling.

Chapter 1 Introduction

Chapter 2 Executive Summary
2.1 Summary of Major Issues
2.2 Summary of Market Forecasts

Chapter 3 Driving Forces
3.1 Introduction
3.2 Trend to 300 mm Wafers
3.3 Development Costs
3.4 Single-Wafer Processing
3.5 Trends in Processing Tools
3.6 Automation Trends
3.7 Benefits of Automated Wafer Handling

Chapter 4 Software
4.1 Introduction
4.2 The Evolution of CIM
4.3 MES in Industry
4.3.1 MES Functionalities
4.3.2 MES Products
4.4 Communication Standards
4.5 Sematech CIM Framework

Chapter 5 Hardware
5.1 Introduction
5.2 Elements of Automation
5.2.1 Tool Automation
5.2.2 Intrabay Automation
5.2.3 Interbay Automation
5.2.4 Material-Control System
5.3 Flexible Automation
5.4 Reliability
5.5 Tool Issues and Trends
5.5.1 Flexible Tool Interface
5.5.2 Vacuum Robotics
5.5.3 AGV
5.5.4 CMP
5.5.5 300-mm Wafer Transport
5.5.6 Mini-Environments and Cleanroom Issues

Chapter 6 Market Analysis
6.1 Market Forces
6.2 Market Forecast Assumptions
6.3 Market Forecast
6.3.1 Automated Transfer Tool Market
6.3.2 Carrier Transport Market
6.3.3 MES Software Market

Chapter 7 User Issues
7.1 Current Automation Thinking
7.2 The New Factory Paradigm
7.3 The New Factory in Action
7.4 Return on Investment Considerations
7.5 Eight Symptoms of the Old Paradigm
7.6 Putting the New Paradigm to Work



For more information visit http://www.researchandmarkets.com/research/vgbvfj/semiconductor

Laura Wood , +353-1-481-1716, press@researchandmarkets.net