Silicon Labs Si504 - CMEMS Oscillator - Technology Analysis

First Fully Integrated, Monolithic Cmos+Mems Oscillator Device The frequency control market is largely dominated by quartz products, but silicon timing solutions have a strong value proposition for some sub-markets. The Si504 is the first silicon oscillator from Silicon Labs. Manufactured with the CMEMS process (CMOS + MEMS), the crystal elements are replaced by micromachined semiconductor resonators. CMEMS process consists in a monolithic integration of a CMOS circuit with Poly-SiGe (polycrystalline silicon-germanium) MEMS resonator structures. The resonator is then vacuum encapsulated with a silicon cap using an eutectic wafer bonding process. The Si504 is optimized to support high-volume, low-cost applications such as consumer electronics market. The Technology Analysis report contains only Physical Analysis & Manufacturing Process Flow. The full reverse costing analysis report provides a complete teardown of the MEMS oscillator with:

First Fully Integrated, Monolithic Cmos+Mems Oscillator Device

The frequency control market is largely dominated by quartz products, but silicon timing solutions have a strong value proposition for some sub-markets.

The Si504 is the first silicon oscillator from Silicon Labs. Manufactured with the CMEMS process (CMOS + MEMS), the crystal elements are replaced by micromachined semiconductor resonators.

CMEMS process consists in a monolithic integration of a CMOS circuit with Poly-SiGe (polycrystalline silicon-germanium) MEMS resonator structures.

The resonator is then vacuum encapsulated with a silicon cap using an eutectic wafer bonding process.

The Si504 is optimized to support high-volume, low-cost applications such as consumer electronics market.


The Technology Analysis report contains only Physical Analysis & Manufacturing Process Flow.

The full reverse costing analysis report provides a complete teardown of the MEMS oscillator with:

For more information visit http://www.researchandmarkets.com/research/qlsl75/silicon_labs

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